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Institute for Quantum Science and Technology

Publications by R. Toukabri

Refereed Journal Publications

20151 publication
  1. R. Toukabri and Y.-J. Shi, Hydrogen elimination from the dissociation of methyl-substituted silanes on tungsten and tantalum surfaces, Canadian Journal of Chemistry 94(4): 265 - 272, 7 July 2015. (Calgary Special Issue).
20143 publications
  1. R. Toukabri and Y.-J. Shi, Effect of pressure on the gas-phase chemistry when using MMS and DMS in hot-wire chemical vapor deposition, Canadian Journal of Chemistry 93(1): 82 - 90, 17 July 2014.
  2. R. Toukabri and Y.-J. Shi, Dominance of silylene chemistry in the decomposition of monomethylsilane in the presence of a heated metal filament, Journal of Physical Chemistry A 118(12): 3866 - 3874, 12 May 2014.
  3. R. Toukabri and Y.-J. Shi, Unraveling the complex chemistry using dimethylsilane as a precursor gas in hot wire chemical vapor deposition , Physical Chemistry Chemical Physics 16: 7896 - 7906, 4 March 2014.
20132 publications
  1. R. Toukabri and Y.-J. Shi, Effect of trimethylsilane pressure on gas-phase reaction chemistry in the hot-wire chemical vapour deposition process, Journal of Vacuum Science and Technology A 31(6): 061606, 11 October 2013.
  2. R. Toukabri, N. Al-Kadhi and Y.-J. Shi, Formation of methyl radicals from decomposition of methyl-substituted silanes over tungsten and tantalum filament surfaces, Journal of Physical Chemistry A 117(33): 7697 - 7704, 22 July 2013.
20111 publication
  1. Y.-J. Shi, X. M. Li, R. Toukabri and L. Tong, Effect of Si-H bond on the gas-phase chemistry of trimethylsilane in the hot wire chemical vapor deposition process, Journal of Physical Chemistry A 115(37): 10290 - 10298, 11 August 2011.
20081 publication
  1. Y.-J. Shi, X. Li, L. Tong, R. Toukabri and B. D. Eustergerling, Decomposition of hexamethyldisilane on a hot tungsten filament and gas-phase reactions in a hot-wire chemical vapor deposition reactor, Physical Chemistry Chemical Physics 10(18): 2543 - 2551, 17 March 2008.

Thesis Publications

20131 publication
  1. R. Toukabri, Gas-phase Chemistry on methyl-substituted silanes in hot-wire chemical vapor depositon (PhD Thesis), 1 August 2013.